Designed to Address Next Generation Device Manufacturing Down
                           to 22nm Node

BEVERLY, Mass., March 15, 2010 (GLOBE NEWSWIRE) -- Axcelis
Technologies, Inc. (Nasdaq:ACLS) today announced that it has broadened
its product portfolio with the introduction of the Integra ESTM
photoresist dry strip cleaning system. The innovative new system,
available immediately, delivers the most advanced non-oxidizing strip
capabilities on the market today for next generation logic and memory
devices.

"The Integra ES sets a new standard for resist removal and cleaning
technology. As chipmakers move towards smaller device structures and
employ new materials, wafer cleaning technology that can remove resist
and polymer residues without causing oxidation plays an increasingly
important role in enabling optimized performance and ensuring device
integrity," commented Bill Bintz, senior vice president of marketing.
"The new system is the perfect synthesis of truly enabling technology
and a production proven platform -- to fuel a new generation of
invention in advanced device manufacturing."

The Integra ES features a unique combination of technology that has the
ability to process wafers with novel, non-oxidizing chemistries, as
well as subsequently cool the processed wafers in an inert environment
to minimize oxidation. These technologies are critical for shallow
source/drains, high k/metal gates and ultra-thin metal films
applications. Built on the production proven, high productivity Integra
platform, the new Integra ES is the only plasma dry strip system
designed to run advanced, non-oxidizing strip processes effectively and
efficiently in a high-volume manufacturing environment.

To learn more about the new Integra ES, as well as other Axcelis
products, please visit our exhibit at SEMICON China in Shanghai from
March 16-18. Axcelis is located in Booth #4000 at the Shanghai New
International Expo Center (SNIEC).

Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly,
Massachusetts, provides innovative, high-productivity solutions for the
semiconductor industry. Axcelis is dedicated to developing enabling
process applications through the design, manufacture and complete life
cycle support of ion implantation and cleaning systems. The company's
Internet address is: www.axcelis.com.




CONTACT:  Axcelis Technologies, Inc.
          Editorial/Media
          Maureen Hart
            978.787.4266
          Financial Community
          Stephen Bassett
            978.787.4000